Hydrothermal Synthesis of Ordered ZnO Nanorod Arrays by Nanosphere Lithography Method

• Published in: 东华大学学报（英文版） Vol. 39; no. 2; pp. 134 - 139
• Main Authors: YAN Yali, ZHANG Liangwei, WANG Jiale
• Format: Journal Article
• Language: English
• Published: College of Science,Donghua University,Shanghai 201620,China 2022
• Subjects: hydrothermal synthesis; nanorod array; ZnO; nanosphere lithography ( NSL)
• ISSN: 1672-5220
• DOI: 10.19884/j.1672-5220.202104014

O782+.9; Ordered ZnO nanorod arrays were hydrothermally synthesized on a patterned GaN substrate formed by a nanosphere lithography method. Firstly, polystyrene ( PS) nanospheres were used to self-assemble a close-packed monolayer on the surface of water. Then the monolayer was transferred onto a GaN substrate. Subsequently, magnetron sputtering of SiO2 was used to reduce the size of PS nanospheres and cover the interstitial space between PS nanospheres by SiO2 at the same time. After removing the PS nanospheres, periodic seed sites were accomplished on the GaN substrate for ZnO growth. Finally, ordered ZnO nanorod arrays, perpendicular to the substrate, were grown on GaN substrates by a hydrothermal method. This work provides a potential low-cost hydrothermal method for the preparation of ordered semiconductor nanorod arrays.