Diaphragm of MEMS electroacoustic transducer

A diaphragm of an MEMS electroacoustic transducer including a first axis-symmetrical pattern layer is provided. Because the layout of the first axis-symmetrical pattern layer can match the pattern of the sound wave, the vibration uniformity of the diaphragm can be improved.

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Bibliographic Details
Main Author	Chen, Li-Che
Format	Patent
Language	English
Published	01.01.2013
Online Access	Get full text

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Summary:	A diaphragm of an MEMS electroacoustic transducer including a first axis-symmetrical pattern layer is provided. Because the layout of the first axis-symmetrical pattern layer can match the pattern of the sound wave, the vibration uniformity of the diaphragm can be improved.