Enhanced quality of laser ablation by controlling laser repetition rate

A method of enhancing the quality of laser ablation by controlling the laser repetition rate during the ablation process, wherein the method enhances the quality of laser ablation of a photomask in order to improve the optical quality thereof. Also provided is a system employing the method of enhanc...

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Bibliographic Details
Main Authors Longo, Peter P, Wagner, Alfred
Format Patent
LanguageEnglish
Published 01.01.2013
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Summary:A method of enhancing the quality of laser ablation by controlling the laser repetition rate during the ablation process, wherein the method enhances the quality of laser ablation of a photomask in order to improve the optical quality thereof. Also provided is a system employing the method of enhancing the quality of laser ablation.