Cassette for accommodating substrates
A cassette for accommodating substrates may include a cassette body for accommodating the substrates; a door for selectively sealing the cassette body; magnetic units for primarily coupling the door to the cassette body; and latch units for secondarily coupling the door to the cassette body. Since t...
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| Main Authors | , , |
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| Format | Patent |
| Language | English |
| Published |
01.01.2013
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| Online Access | Get full text |
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| Summary: | A cassette for accommodating substrates may include a cassette body for accommodating the substrates; a door for selectively sealing the cassette body; magnetic units for primarily coupling the door to the cassette body; and latch units for secondarily coupling the door to the cassette body. Since the door completely contacts the cassette body, penetration of a contamination source from an external environment may be fundamentally prevented. Also, since the door is double coupled to the cassette body by the magnetic units and the latch units, firm coupling may be achieved. |
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