Image sensor having curved micro-mirrors over the sensing photodiode and method for fabricating

The invention involves the integration of curved micro-mirrors over a photodiode active area (collection area) in a CMOS image sensor (CIS) process. The curved micro-mirrors reflect light that has passed through the collection area back into the photo diode. The curved micro-mirrors are best impleme...

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Bibliographic Details
Main Authors Venezia, Vincent, Tai, Hsin-Chih
Format Patent
LanguageEnglish
Published 25.12.2012
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Summary:The invention involves the integration of curved micro-mirrors over a photodiode active area (collection area) in a CMOS image sensor (CIS) process. The curved micro-mirrors reflect light that has passed through the collection area back into the photo diode. The curved micro-mirrors are best implemented in a backside illuminated device (BSI).