Optical module

• Main Authors: Warashina, Yoshihisa, Suzuki, Tomofumi
• Format: Patent
• Language: English
• Published: 18.12.2012

a a a a a An optical module A is an optical module, which is manufactured from an SOI substrate having a support substrate and a semiconductor layer disposed on a surface of the support substrate via an insulating layer , the optical module including a movable mirror in which a mirror surface is for...