Optical module
a a a a a An optical module A is an optical module, which is manufactured from an SOI substrate having a support substrate and a semiconductor layer disposed on a surface of the support substrate via an insulating layer , the optical module including a movable mirror in which a mirror surface is for...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
18.12.2012
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| Online Access | Get full text |
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| Summary: | a a a a a An optical module A is an optical module, which is manufactured from an SOI substrate having a support substrate and a semiconductor layer disposed on a surface of the support substrate via an insulating layer , the optical module including a movable mirror in which a mirror surface is formed on a side face intersecting with a Y-direction, that is movable in the Y-direction, a photodiode which is provided on the surface of the support substrate , and is optically coupled to the mirror surface of the movable mirror , a cap member which is provided on the surface of the support substrate , that airtight-seals the movable mirror and the photodiode , and an element electrode part which is provided through the support substrate and the insulating layer , and is electrically connected to the photodiode . Thereby, it is possible to realize an optical module which is capable of enhancing the airtightness of an optical system including a movable mirror, and which also can be downsized. |
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