Optical component cleanliness and debris management in laser micromachining applications

Preferred embodiments of a purge gas port, laser beam attenuating input window, and laser shutter constitute subsystems of a UV laser optical system in which a laser beam is completely enclosed to reduce contamination of the optical system components. Purge gas is injected through multiple locations...

Full description

Saved in:
Bibliographic Details
Main Authors Bolt, Bryan C, Hemenway, David M, Kosmowski, Mark, Lerner, A. Grey, Nilsen, Brady E, Pope, Richard
Format Patent
LanguageEnglish
Published 27.11.2012
Online AccessGet full text

Cover

More Information
Summary:Preferred embodiments of a purge gas port, laser beam attenuating input window, and laser shutter constitute subsystems of a UV laser optical system in which a laser beam is completely enclosed to reduce contamination of the optical system components. Purge gas is injected through multiple locations in a beam tube assembly to ensure that the optical component surfaces sensitive to contamination are in the flow path of the purge gas. The input window functions as a fixed level attenuator to limit photopolymerization of airborne molecules and particles. Periodically rotating optical elements asymmetrically in their holders reduces burn damage to the optics.