Piezoelectric vibrator, piezoelectric vibrator manufacturing method, oscillator, electronic device, radio-controlled timepiece
Providing a piezoelectric vibrator and a manufacturing method thereof which is capable of achieving gettering in a state where the frequency change of the piezoelectric vibrating reed is suppressed. Providing a piezoelectric vibrator including: a package having a base board and a lid board which are...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
03.07.2012
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| Online Access | Get full text |
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| Summary: | Providing a piezoelectric vibrator and a manufacturing method thereof which is capable of achieving gettering in a state where the frequency change of the piezoelectric vibrating reed is suppressed. Providing a piezoelectric vibrator including: a package having a base board and a lid board which are bonded in a superimposed state and a cavity C formed between both boards ; and a piezoelectric vibrating reed and a gettering material which are accommodated in the same cavity C, wherein a shielding wall is provided in the cavity C so as to shield the piezoelectric vibrating reed from the gettering material , and the shielding wall is connected to both the base board and the lid board |
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