Sapphire substrates and methods of making same

2A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm, wherein nTTV is total thickness variation normalized for...

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Bibliographic Details
Main Authors Tanikella, Brahmanandam V, Chinnakaruppan, Palaniappan, Rizzuto, Robert A, Cherian, Isaac K, Vedantham, Ramanujam
Format Patent
LanguageEnglish
Published 12.06.2012
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Summary:2A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.