Accessible stress-based electrostatic monitoring of chemical reactions and binding

A sensor may include a substrate that has a cavity formed in a surface thereof. A diaphragm, having a conductive portion, may be suspended over the cavity, a selective coating may be present on a face of the diaphragm outside of the cavity, and a counterelectrode may be spaced from and in opposition...

Full description

Saved in:
Bibliographic Details
Main Authors Carlen, Edwin, Weinberg, Marc S, Uhland, Angela Z, Bernstein, Jonathan, Aceti, John, Tupper, Malinda M
Format Patent
LanguageEnglish
Published 22.05.2012
Online AccessGet full text

Cover

More Information
Summary:A sensor may include a substrate that has a cavity formed in a surface thereof. A diaphragm, having a conductive portion, may be suspended over the cavity, a selective coating may be present on a face of the diaphragm outside of the cavity, and a counterelectrode may be spaced from and in opposition to the diaphragm. The diaphragm may deform upon interaction of the selective coating with an analyte and thereby alter a capacitance of the sensor in a manner indicative of a degree of interaction.