Radiation system with contamination barrier

A radiation system includes a contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris coming from the radiation source. The contamination barrier includes a plurality of lamellas. The surface of the lamellas includes a material. The radiatio...

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Bibliographic Details
Main Authors Bakker, Levinus Pieter, Dierichs, Marcel Mathijs Theodore Marie, Freriks, Johannes Maria, Schuurmans, Frank Jeroen Pieter, Vijfvinkel, Jakob, Box, Wilhelmus Josephus
Format Patent
LanguageEnglish
Published 06.03.2012
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Summary:A radiation system includes a contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris coming from the radiation source. The contamination barrier includes a plurality of lamellas. The surface of the lamellas includes a material. The radiation system also includes a collector configured to collect radiation from the contamination barrier. An optical surface of the collector includes a material that is the same as the material of the surface of the lamellas.