Apparatus for testing electronic devices

An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths...

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Main Authors Richmond, II, Donald P, Deboe, Kenneth W, Uher, Frank O, Jovanovic, Jovan, Lindsey, Scott E, Maenner, Thomas T, Shepherd, Patrick M, Tyson, Jeffrey L, Carbone, Mark C, Burke, Paul W, Cao, Doan D, Tomic, James F, Vu, Long V
Format Patent
LanguageEnglish
Published 21.02.2012
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Summary:An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.