Atmospheric pressure plasma apparatus

Disclosed is an atmospheric pressure plasma apparatus for enhancing and or controlling the dissociation of a secondary gas by converting a source gas into a plasma state at atmospheric pressure and controlling the interaction between that plasma and the secondary gas using porous metal, and ceramic...

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Main Authors Choi, Bum Ho, Lee, Jong Ho, Bae, Jung Chan, Park, Yong-Seok, Park, Chun-Seong, Kim, Woo Sam, Lee, Gil Sik, Overzet, Lawrence John, Lee, Byeong Jun
Format Patent
LanguageEnglish
Published 07.02.2012
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Summary:Disclosed is an atmospheric pressure plasma apparatus for enhancing and or controlling the dissociation of a secondary gas by converting a source gas into a plasma state at atmospheric pressure and controlling the interaction between that plasma and the secondary gas using porous metal, and ceramic tubes to create a path having controllable isolation from the region where plasma is generated.