Semiconductor device and method for making same

One or more embodiments may relate to a method for making a semiconductor structure, the method including: forming an opening at least partially through a workpiece; and forming an enclosed cavity within the opening, the forming the cavity comprising forming a paste within the opening.

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Bibliographic Details
Main Authors Frank, Manfred, Nikitin, Ivan, Kunstmann, Thomas
Format Patent
LanguageEnglish
Published 24.01.2012
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Summary:One or more embodiments may relate to a method for making a semiconductor structure, the method including: forming an opening at least partially through a workpiece; and forming an enclosed cavity within the opening, the forming the cavity comprising forming a paste within the opening.