Polishing apparatus and polishing method

• Main Authors: Nakao, Hidetaka, Hayashi, Eisaku, Oishi, Kunio, Hayakawa, Isao, Miyake, Yoshiaki, Tateyama, Yoshikuni, Ashihara, Takeshi
• Format: Patent
• Language: English
• Published: 13.12.2011

An apparatus polishes an object material such as a film on a substrate. This apparatus includes a polishing table for holding a polishing pad having a polishing surface, a motor configured to drive the polishing table, a holding mechanism configured to hold a substrate having an object material to b...