Method for making titanium-based compound film of poly silicon solar cell

A method is disclosed for making a titanium-based compound film of a poly-silicon solar cell. In the method, a ceramic substrate is made of aluminum oxide. The ceramic substrate is coated with a titanium film in an e-gun evaporation system. Dichlorosilane is provided on the titanium film by atmosphe...

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Bibliographic Details
Main Authors Yang, Tsun-Neng, Lan, Shan-Ming, Chiang, Chin-Chen, Ma, Wei-Yang, Ku, Chien-Te, Huang, Yu-Hsiang
Format Patent
LanguageEnglish
Published 08.11.2011
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Summary:A method is disclosed for making a titanium-based compound film of a poly-silicon solar cell. In the method, a ceramic substrate is made of aluminum oxide. The ceramic substrate is coated with a titanium film in an e-gun evaporation system. Dichlorosilane is provided on the titanium film by atmospheric pressure chemical vapor deposition. A titanium-based compound film is formed on the ceramic substrate.