Method of preventing abnormal large grains from being included into thin nano-crystalline diamond film

The present invention relates to a method of preventing abnormal large grains from being included in a NCD thin film during a hot filament CVD process by appropriately controlling the deposition condition regarding a temperature-measuring means, a deposition pressure, an electrical potential and/or...

Full description

Saved in:
Bibliographic Details
Main Authors Li, Heqing, Lee, Wook Seong, Baik, Young Joon, Park, Jong-Keuk
Format Patent
LanguageEnglish
Published 11.10.2011
Online AccessGet full text

Cover

More Information
Summary:The present invention relates to a method of preventing abnormal large grains from being included in a NCD thin film during a hot filament CVD process by appropriately controlling the deposition condition regarding a temperature-measuring means, a deposition pressure, an electrical potential and/or the composition of a raw material gas flow.