Vibration body for angular speed sensor
A vibration body for angular speed sensor has a vibrator that includes vibration pieces, a supporting part for supporting the vibration pieces, and a mounting substrate for mounting the vibrator. The mounting substrate has a seat part for fixing the supporting part and supporting the vibrator and a...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
04.10.2011
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| Online Access | Get full text |
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| Summary: | A vibration body for angular speed sensor has a vibrator that includes vibration pieces, a supporting part for supporting the vibration pieces, and a mounting substrate for mounting the vibrator. The mounting substrate has a seat part for fixing the supporting part and supporting the vibrator and a base part. The seat part has a level difference representing a predetermined height from the base part. The predetermined height is set larger than an oscillation width of the vibration pieces. The seat part also has an edge portion that has a shape of a curved line, and each line in a direction perpendicular to each position on the edge portion determines a mounting angle for mounting the vibrator and has an angle in the same direction as a reference direction defined in the mounting substrate or in a direction at least one being different from it. |
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