Method of manufacturing a piezoelectric vibrator
A method for manufacturing a plurality of piezoelectric vibrators includes forming, in the lid substrate wafer, a plurality of cavity recesses forming a plurality of through-electrodes in and through the base substrate wafer; bonding the plural piezoelectric vibration members to the upper face of th...
Saved in:
| Main Authors | , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
20.09.2011
|
| Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!