Semiconductor device and method of manufacturing the same

• Main Authors: Joo, Kyung Joong, Kim, Han Soo
• Format: Patent
• Language: English
• Published: 06.09.2011

Example embodiments are directed to a method of manufacturing a semiconductor device and a semiconductor device including a substrate including a plurality of active regions and a plurality of isolation regions between adjacent active regions, each active region including a groove, a bottom surface...