Photodiode array having semiconductor substrate and crystal fused regions and method for making thereof

Disclosed is a photodiode array comprising a semiconductor substrate; a plurality of photodiodes formed on the semiconductor substrate; and crystal fused regions losing crystallinity by fusing a semiconductor material of the photodiodes between the plurality of photodiodes.

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Bibliographic Details
Main Authors Fujii, Yoshimaro, Okamoto, Kouji, Sakamoto, Akira
Format Patent
LanguageEnglish
Published 14.06.2011
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Summary:Disclosed is a photodiode array comprising a semiconductor substrate; a plurality of photodiodes formed on the semiconductor substrate; and crystal fused regions losing crystallinity by fusing a semiconductor material of the photodiodes between the plurality of photodiodes.