Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods

An assembly including a conditioning system and an object movable into and/or out of an area to be conditioned is disclosed. The conditioning system has fluid outlet passages to supply conditioning fluid to the area to be conditioned and is configured to adjust outflow of the conditioning fluid from...

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Bibliographic Details
Main Authors Van Der Ham, Ronald, Van Empel, Tjarko Adriaan Rudolf, Vogel, Herman, Roset, Niek Jacobus Johannes
Format Patent
LanguageEnglish
Published 12.04.2011
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Summary:An assembly including a conditioning system and an object movable into and/or out of an area to be conditioned is disclosed. The conditioning system has fluid outlet passages to supply conditioning fluid to the area to be conditioned and is configured to adjust outflow of the conditioning fluid from the fluid outlet passages depending on a position of the object.