Capacitor with pillar type storage node and method for fabricating the same including conductive capping layer

A capacitor includes a pillar-type storage node, a supporter filling an inner empty crevice of the storage node, a dielectric layer over the storage node, and a plate node over the dielectric layer.

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Bibliographic Details
Main Authors Lee, Kee-Jeung, Song, Han-Sang, Kil, Deok-Sin, Kim, Young-Dae, Kim, Jin-Hyock, Do, Kwan-Woo, Park, Kyung-Woong
Format Patent
LanguageEnglish
Published 22.03.2011
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Summary:A capacitor includes a pillar-type storage node, a supporter filling an inner empty crevice of the storage node, a dielectric layer over the storage node, and a plate node over the dielectric layer.