Method and system for detecting tool errors to stop a process recipe for a single chamber

A method for detecting tool errors to stop a process recipe for a single chamber is disclosed. When a recipe error for one of chamber of a process tool is detected, only the chamber with the recipe error is terminated and other chambers are allowed to proceed with their recipe processes for preventi...

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Bibliographic Details
Main Authors Chen, Chun-Hsiang, Lai, Yun-Sen, Ho, Keng-Hsien, Tseng, Chien-Lung, Kuo, Hung-Chih
Format Patent
LanguageEnglish
Published 15.03.2011
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Summary:A method for detecting tool errors to stop a process recipe for a single chamber is disclosed. When a recipe error for one of chamber of a process tool is detected, only the chamber with the recipe error is terminated and other chambers are allowed to proceed with their recipe processes for preventing excursions.