Method for making multi-crystalline film of solar cell

+−++−+−A method is disclosed to make a multi-crystalline silicon film of a solar cell. The method includes the step of providing a ceramic substrate, the step of providing a titanium-based film on the ceramic substrate, the step of providing a p-type back surface field layer on the titanium-based fi...

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Bibliographic Details
Main Authors Yang, Tsun-Neng, Lan, Shan-Ming, Chiang, Chin-Chen, Ma, Wei-Yang, Ku, Chien-Te, Huang, Yu-Hsiang
Format Patent
LanguageEnglish
Published 22.02.2011
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Summary:+−++−+−A method is disclosed to make a multi-crystalline silicon film of a solar cell. The method includes the step of providing a ceramic substrate, the step of providing a titanium-based film on the ceramic substrate, the step of providing a p-type back surface field layer on the titanium-based film, the step of providing a p-type light-soaking layer on the p-type back surface field layer and the step of conducting n-type diffusive deposition of phosphine on the p-type light-soaking layer based on atmospheric pressure chemical vapor deposition, thus forming an n-type emitter on the p-type light-soaking layer.