Surface treatment system and method
A surface treatment system is disclosed to form a deposition layer at a surface of an object of surface treatment by using a deposition reaction in which an electrode for applying power to form a deposition reaction in the deposition chamber is installed between an inner wall of the deposition chamb...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
16.03.2010
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Online Access | Get full text |
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Summary: | A surface treatment system is disclosed to form a deposition layer at a surface of an object of surface treatment by using a deposition reaction in which an electrode for applying power to form a deposition reaction in the deposition chamber is installed between an inner wall of the deposition chamber and an object of surface treatment and further includes a cooling unit installed at the inner wall of the deposition chamber facing the electrode and cooling ambient thereof. |
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