Surface treatment system and method

A surface treatment system is disclosed to form a deposition layer at a surface of an object of surface treatment by using a deposition reaction in which an electrode for applying power to form a deposition reaction in the deposition chamber is installed between an inner wall of the deposition chamb...

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Bibliographic Details
Main Authors Cho, Cheon-Soo, Youn, Dong-Sik, Lee, Hyun-Wook, Ha, Samchul
Format Patent
LanguageEnglish
Published 16.03.2010
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Summary:A surface treatment system is disclosed to form a deposition layer at a surface of an object of surface treatment by using a deposition reaction in which an electrode for applying power to form a deposition reaction in the deposition chamber is installed between an inner wall of the deposition chamber and an object of surface treatment and further includes a cooling unit installed at the inner wall of the deposition chamber facing the electrode and cooling ambient thereof.