Composite stamper for imprint lithography
A stamper having a patterned layer composed of a hard material and a compressible material back plane layer. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed above a substrate for the production of a magnetic recording disk.
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| Main Author | |
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| Format | Patent |
| Language | English |
| Published |
15.12.2009
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| Online Access | Get full text |
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| Summary: | A stamper having a patterned layer composed of a hard material and a compressible material back plane layer. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed above a substrate for the production of a magnetic recording disk. |
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