Integrated circuit capacitor having antireflective dielectric

A capacitor is disclosed that is formed as part of an integrated circuit (IC) fabrication process. The capacitor has conductive top and bottom electrodes and a nonconductive capacitor dielectric. In one example, the dielectric includes first and second thin dielectric layers that sandwich a layer of...

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Bibliographic Details
Main Authors Wofford, Bill Alan, Pasker, Blake Ryan, Chen, Xinfen, Hu, Binghua
Format Patent
LanguageEnglish
Published 29.09.2009
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Summary:A capacitor is disclosed that is formed as part of an integrated circuit (IC) fabrication process. The capacitor has conductive top and bottom electrodes and a nonconductive capacitor dielectric. In one example, the dielectric includes first and second thin dielectric layers that sandwich a layer of antireflective material. The thin layers provide the dielectric behavior necessary for the capacitor while the antireflective layer promotes reduced feature sizes by mitigating reflected standing waves, among other things.