Micromirror array device comprising encapsulated reflective metal layer and method of making the same

The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances,...

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Bibliographic Details
Main Authors Sohn, Jin Young, Cho, Gyoung Il, Seo, Cheong Soo
Format Patent
LanguageEnglish
Published 15.09.2009
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Summary:The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.