Micro device and manufacturing method thereof

A micro device and manufacturing method thereof. The micro device includes a substrate, an insulation layer, and a solution. The insulation layer is disposed on the substrate to define a channel portion and an extension portion communicated with the channel portion. The solution is location in the c...

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Bibliographic Details
Main Authors Cheng, Kevin, Sung, Chao-Feng, Lee, Yuh-Zheng, Hu, Je-Ping, Chang, Jane, Yang, Jinn-Cherng
Format Patent
LanguageEnglish
Published 08.09.2009
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Summary:A micro device and manufacturing method thereof. The micro device includes a substrate, an insulation layer, and a solution. The insulation layer is disposed on the substrate to define a channel portion and an extension portion communicated with the channel portion. The solution is location in the channel portion. Part of the solution flows to the extension portion by capillary force between the channel portion and the extension portion.