Liquid ejection head, liquid ejection apparatus, and manufacturing method of liquid ejection head

A liquid ejection head includes an energy-generating element arranged on a semiconductor substrate, a barrier layer deposited on the semiconductor substrate for forming a liquid chamber in the periphery of the energy-generating element, and a nozzle sheet bonded on the barrier layer and having a noz...

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Main Authors Eguchi, Takeo, Ono, Shogo, Takenaka, Kazuyasu, Nakamura, Atsushi, Ikemoto, Yuichiro, Hirashima, Shigeyoshi, Nakayama, Atsushi, Nishi, Shota, Yakura, Yuji, Fujiki, Shigeyoshi, Matsuda, Manabu
Format Patent
LanguageEnglish
Published 01.09.2009
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Summary:A liquid ejection head includes an energy-generating element arranged on a semiconductor substrate, a barrier layer deposited on the semiconductor substrate for forming a liquid chamber in the periphery of the energy-generating element, and a nozzle sheet bonded on the barrier layer and having a nozzle formed at a position opposing the energy-generating element, in which the liquid ejection head ejects liquid contained in the liquid chamber from the nozzle as liquid droplets by the energy-generating element, and the barrier layer is provided with a plurality of depressions, each having an independent contour, arranged within a range, which is separated from the border of the barrier layer, on an adhesive region adhering to the nozzle sheet.