Multi-layer piezoelectric measuring element, and pressure sensor or force sensor comprising such a measuring element
A piezoelectric measuring element consists of at least two piezoelectric crystals showing a transversal effect for the measurement of axially acting forces and/or pressures as well as to a pressure or force sensor comprising said element. The crystals with transversal effect having an opposite polar...
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| Main Authors | , , |
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| Format | Patent |
| Language | English |
| Published |
16.06.2009
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| Online Access | Get full text |
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| Summary: | A piezoelectric measuring element consists of at least two piezoelectric crystals showing a transversal effect for the measurement of axially acting forces and/or pressures as well as to a pressure or force sensor comprising said element. The crystals with transversal effect having an opposite polarization to each other are attached to each other by means of a lateral electrode. In this manner, if n crystals are attached to each other, a single multi-layer measuring element is obtained with a stability under load which is n-times that of an individual crystal. Preferably, the electrodes extend alternately into the two force-absorbing end faces of the crystals. Such measuring elements can be fabricated from wafers in a cost-effective manner. A compact multi-layer measuring element prepared in this way can be easily mounted in a sensor, particularly a force or pressure sensor, without the risk of inclination. |
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