Mold, imprint method, and process for producing chip

A mold capable of effecting alignment of the mold and the member to be processed with high accuracy even in such a state that a photocurable resin material is disposed between the mold and the member to be processed is constituted by a substrate formed of a first material and an alignment mark forme...

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Bibliographic Details
Main Authors Terasaki, Atsunori, Seki, Junichi, Suehira, Nobuhito, Ina, Hideki, Okushima, Shingo
Format Patent
LanguageEnglish
Published 31.03.2009
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Summary:A mold capable of effecting alignment of the mold and the member to be processed with high accuracy even in such a state that a photocurable resin material is disposed between the mold and the member to be processed is constituted by a substrate formed of a first material and an alignment mark formed of a second material different from the first material. The first material and the second material have transmittivities to light in a part of an ultraviolet wavelength range of the ultraviolet light. The second material has a refractive index of not less than 1.7.