Metal photoetching product and production method thereof

112212A metal photoetching product comprising at least one large cavity of minor axis WS, major axis WL and depth D in a surface of the product, wherein one or more cavities are included inside at least one of the at least one large cavity, and a smallest hole among the cavities has minor axis of WS...

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Bibliographic Details
Main Authors Ueda, Ryuji, Tanaka, Satoshi, Koga, Osamu, Takagi, Fusao, Matsuzawa, Hiroshi, Onoda, Yusuke, Akao, Shingo
Format Patent
LanguageEnglish
Published 03.03.2009
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Summary:112212A metal photoetching product comprising at least one large cavity of minor axis WS, major axis WL and depth D in a surface of the product, wherein one or more cavities are included inside at least one of the at least one large cavity, and a smallest hole among the cavities has minor axis of WS, major axis WL, and depth D; and the product satisfies the following dimensions, DDplate thickness D, 0.02 mm≦D≦2 mm, 0.4×D<WS<D, and 0.2×D<WS<0.8×D.