Packages for alkanes having ultra-high transparency at 193 nm

A method for preparing packages holding liquid alkanes exhibiting high transparency and photochemical stability at wavelength of about 193 nm, wherein a sealable vessel is flushed with an inert gas to form an atmosphere of inert gas, a liquid alkane is charged into the vessel in the atmosphere of in...

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Bibliographic Details
Main Authors Wheland, Robert Clayton, Fincher, Curtis R, French, Roger Harquail, Peng, Sheng, Qiu, Weiming
Format Patent
LanguageEnglish
Published 24.02.2009
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Summary:A method for preparing packages holding liquid alkanes exhibiting high transparency and photochemical stability at wavelength of about 193 nm, wherein a sealable vessel is flushed with an inert gas to form an atmosphere of inert gas, a liquid alkane is charged into the vessel in the atmosphere of inert gas, and the charged vessel is sealed.