Discretely controlled micromirror array device with segmented electrodes

This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selecti...

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Bibliographic Details
Main Authors Kim, Hye Young, Gim, Dong Woo, Sohn, Jin Young, Cho, Gyoung Il, Seo, Cheong Soo
Format Patent
LanguageEnglish
Published 10.02.2009
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Summary:This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.