Method for manufacturing micro lenses including underlayer film and lens film etching steps

A solid-state imager is disclosed wherein isolation regions are covered with power supply lines, a light-transmitting lens film whose surface forms continuous convex portions above the isolation regions convex towards channel regions is provided, and a light-transmitting material having a refractive...

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Bibliographic Details
Main Authors Kai, Seiji, Matsui, Ryouji, Yamada, Tetsuya, Imai, Tsutomu, Takegawa, Kazuyuki
Format Patent
LanguageEnglish
Published 02.12.2008
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Summary:A solid-state imager is disclosed wherein isolation regions are covered with power supply lines, a light-transmitting lens film whose surface forms continuous convex portions above the isolation regions convex towards channel regions is provided, and a light-transmitting material having a refractive index lower than that of the lens film is provided over the lens film.