Electrostatic actuator formed by a semiconductor manufacturing process
aaaaaaaaAn electrostatic actuator has high-reliability and less variation in characteristics. An electrode is formed on a substrate, and a plurality of partition parts are formed on the electrode. A vibration plate is formed on the partition parts, and is deformable by an electrostatic force generat...
Saved in:
Main Authors | , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
26.08.2008
|
Online Access | Get full text |
Cover
Loading…
Summary: | aaaaaaaaAn electrostatic actuator has high-reliability and less variation in characteristics. An electrode is formed on a substrate, and a plurality of partition parts are formed on the electrode. A vibration plate is formed on the partition parts, and is deformable by an electrostatic force generated by a voltage applied to the electrode so that an air gap is formed between the partition parts by etching a part of a sacrifice layer formed between the electrode and the vibration plate. The partition parts are formed of remaining parts of the sacrifice layer after the etching. |
---|