Electrostatic actuator formed by a semiconductor manufacturing process

aaaaaaaaAn electrostatic actuator has high-reliability and less variation in characteristics. An electrode is formed on a substrate, and a plurality of partition parts are formed on the electrode. A vibration plate is formed on the partition parts, and is deformable by an electrostatic force generat...

Full description

Saved in:
Bibliographic Details
Main Authors Nishimura, Manabu, Kuroda, Takahiko, Abe, Shuya, Tanaka, Makoto, Irinoda, Mitsugu, Hashimoto, Kenichiroh
Format Patent
LanguageEnglish
Published 26.08.2008
Online AccessGet full text

Cover

More Information
Summary:aaaaaaaaAn electrostatic actuator has high-reliability and less variation in characteristics. An electrode is formed on a substrate, and a plurality of partition parts are formed on the electrode. A vibration plate is formed on the partition parts, and is deformable by an electrostatic force generated by a voltage applied to the electrode so that an air gap is formed between the partition parts by etching a part of a sacrifice layer formed between the electrode and the vibration plate. The partition parts are formed of remaining parts of the sacrifice layer after the etching.