Micromachined apparatus with co-linear drive arrays

A mass includes a first set of drive fingers interdigitated with a first array of fixed drive fingers and a second set of drive fingers interdigitated with a second array of fixed drive fingers. Each array of fixed drive fingers is affixed to a substrate using a plurality of anchors. The anchors for...

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Bibliographic Details
Main Author Geen, John A
Format Patent
LanguageEnglish
Published 15.04.2008
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Summary:A mass includes a first set of drive fingers interdigitated with a first array of fixed drive fingers and a second set of drive fingers interdigitated with a second array of fixed drive fingers. Each array of fixed drive fingers is affixed to a substrate using a plurality of anchors. The anchors for the first and second arrays of fixed drive fingers are arranged to be co-linear in a lateral direction relative to the motion of the mass.