Method of adhering polishing pads and jig for adhering the same
The method of adhering polishing pads is capable of easily exchanging polishing pads in a comfortable posture. The method comprises the steps of: setting a pad adhering carrier, which has a through-hole in which a roller unit for pressing polishing pads is fixed, in a holder with arranging a roller...
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| Main Authors | , |
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| Format | Patent |
| Language | English |
| Published |
11.12.2007
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| Online Access | Get full text |
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| Summary: | The method of adhering polishing pads is capable of easily exchanging polishing pads in a comfortable posture. The method comprises the steps of: setting a pad adhering carrier, which has a through-hole in which a roller unit for pressing polishing pads is fixed, in a holder with arranging a roller unit in a radial direction of a lower polishing plate and an upper polishing plate; relatively moving the upper polishing plate toward the lower polishing plate so as to clamp the roller unit between the lower polishing plate and the upper polishing plate with a prescribed force; rotating the lower polishing plate and the upper polishing plate, which clamp the roller unit, in the opposite directions at the same speed; and pressing the polishing pads onto polishing faces of the lower polishing plate and the upper polishing plate by the roller unit. |
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