Method of adhering polishing pads and jig for adhering the same

The method of adhering polishing pads is capable of easily adhering the polishing pads without damages. The method comprises the steps of: tentatively adhering the polishing pads to polishing plates; attaching a roller unit having a shaft and a roller member, which is capable of rotating about the s...

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Bibliographic Details
Main Authors Nakamura, Yoshio, Koyama, Harumichi
Format Patent
LanguageEnglish
Published 09.10.2007
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Summary:The method of adhering polishing pads is capable of easily adhering the polishing pads without damages. The method comprises the steps of: tentatively adhering the polishing pads to polishing plates; attaching a roller unit having a shaft and a roller member, which is capable of rotating about the shaft and which has a projected section having a prescribed width and spirally formed in an outer circumferential face, on the lower polishing plate in the radial direction; moving the upper polishing plate downward, by the holding unit, until the upper polishing plate contacts the roller member; and simultaneously adhering the polishing pads onto the upper and lower polishing plate by rotating the upper and polishing plates in the opposite directions at the same speed with pressing the roller member by the upper polishing plate.