System for creating a turbulent flow of fluid between a mold and a substrate

The present invention is directed toward a system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, the system including, a fluid supply system; and a chuck body having a baffle and first and second apertures, the first and second apertures disposed between t...

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Bibliographic Details
Main Authors McMackin, Ian M, Stacey, Nicholas A, Babbs, Daniel A, Voth, Duane J, Watts, Mathew P. C, Truskett, Van N, Xu, Frank Y, Voisin, Ronald D, Lad, Pankaj B
Format Patent
LanguageEnglish
Published 18.09.2007
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Summary:The present invention is directed toward a system for introducing a flow of a fluid between a mold, disposed on a template, and a substrate, the system including, a fluid supply system; and a chuck body having a baffle and first and second apertures, the first and second apertures disposed between the baffle and the template, with the first and second apertures in fluid communication with the fluid supply system to produce a turbulent flow of the fluid between the mold and said substrate.