Volatile memory devices and methods for forming same
A method for forming a volatile memory device. A substrate comprising a pair of neighboring trenches is provided, each trench comprising a capacitor. A collar insulating layer is formed on an upper sidewall of each trench. The collar insulating layer comprises a low level portion and a high level po...
Saved in:
Main Authors | , , |
---|---|
Format | Patent |
Language | English |
Published |
10.07.2007
|
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!