Stage assembly including a reaction assembly having a connector assembly
A stage assembly for moving and positioning a device includes a stage base, a stage, a stage mover assembly, and a reaction assembly. The stage mover assembly moves the stage relative to the stage base. The reaction assembly is coupled to the stage mover assembly. The reaction assembly reduces the r...
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| Format | Patent |
| Language | English |
| Published |
22.05.2007
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| Online Access | Get full text |
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| Summary: | A stage assembly for moving and positioning a device includes a stage base, a stage, a stage mover assembly, and a reaction assembly. The stage mover assembly moves the stage relative to the stage base. The reaction assembly is coupled to the stage mover assembly. The reaction assembly reduces the reaction forces created by the stage mover assembly that are transferred to the stage base. In one embodiment, the reaction assembly includes a pair of masses (A), (B) and a connector assembly that connects the masses (A), (B) together, allows the masses to move independently along a first axis, and causes the masses (A), (B) to move concurrently along a second axis. |
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