Controlling a material processing tool and performance data

According to an embodiment of the present invention, a material processing systeme including a process tool and a process performance control system. The process performance control system includes a process performance controller coupled to the process tool, where the process performance controller...

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Bibliographic Details
Main Authors Lam, Hieu A, Yue, Hongyu
Format Patent
LanguageEnglish
Published 23.01.2007
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Summary:According to an embodiment of the present invention, a material processing systeme including a process tool and a process performance control system. The process performance control system includes a process performance controller coupled to the process tool, where the process performance controller includes a process performance prediction model, a process recipe correction filter, a process controller, and process performance model correction algorithm. The process performance prediction model is configured to receive tool data from a plurality of sensors coupled to process tool and to predict process performance data. The process recipe correction filter is coupled to the process performance prediction model and configured to receive predicted process performance data and generate a process recipe correction for run-to-run process control. The process controller is coupled to the process recipe correction filter and is configured to update a process recipe according to the process recipe correction.