Semiconductor acceleration sensor and process for manufacturing the same

• Main Authors: Nakamizo, Yoshiyuki, Sawai, Tsutomu, Ando, Masato
• Format: Patent
• Language: English
• Published: 17.10.2006

d d d The present invention provides a semiconductor acceleration sensor wherein a semiconductor element is prevented from being damaged even when at least part of a weight is disposed in an internal space of a semiconductor sensor element and the mass of a weight is accordingly increased. An inner peripheral surface of a support portion is constituted by four trapezoidal inclined surfaces of a substantially identical shape which are annularly combined so as to define an outer peripheral surface of a frust-pyramidal space. A weight is so constructed as to have an abutting portion including a linear portion which abuts against the inclined surfaces constituting the inner peripheral surface of the support portion when the weight makes a maximum displacement in a direction where a diaphragm portion is located. The abutting portion has a circular outline shape as seen from a side where a weight fixing portion is located. A stopper structure is constituted by the inclined surfaces and the abutting portion of the weight , for restricting a displacement range of the weight in the direction where the diaphragm portion is located.