Capacitance type force sensors

Capacitance element electrodes (E to E) and a grounded reference electrode (E) are formed on a substrate. A displacement electrode that is Z-axially displaced in accordance with a Z-axial movement of a detective member externally operated, is disposed so as to be opposed to the above electrodes (E t...

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Bibliographic Details
Main Authors Morimoto, Hideo, Agaya, Tomohiro
Format Patent
LanguageEnglish
Published 10.10.2006
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Summary:Capacitance element electrodes (E to E) and a grounded reference electrode (E) are formed on a substrate. A displacement electrode that is Z-axially displaced in accordance with a Z-axial movement of a detective member externally operated, is disposed so as to be opposed to the above electrodes (E to E). The displacement electrode cooperates with the reference electrode (E) and the capacitance element electrodes (E to E) to form capacitance elements (C to C), respectively. Each of the capacitance elements (C to C) is connected to the capacitance element (C) in series in relation to an externally input signal. Changes in the capacitance values of the capacitance elements (C to C) when the detective member is moved, is detected by a signal processing circuit having hysteretic characteristics. Thereby, the displacement of the detective member is detected.