Stability of ion beam generated alignment layers by surface modification

A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling bonds on the surface. Another method for preparing an alignment layer surface provides a surface on the...

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Main Authors Callegari, Alessandro C, Chaudhari, Praveen, Doany, Fuad E, Doyle, James P, Galligan, Eileen A, Glownia, James H, Hougham, Gareth G, Lacey, James A, Lien, Shui-Chih, Lu, Minhua, Rosenbluth, Alan E, Yang, Kei-Hsiung
Format Patent
LanguageEnglish
Published 29.08.2006
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Summary:A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling bonds on the surface. Another method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions and quenched with a reactive component to saturate dangling bonds on the surface.